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Patent No. |
Issued Patents |
Products |
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5,187,580 |
High Power Switch-Mode Radio Frequency Amplifier Method and Apparatus |
RFG, Apex®, Litmas, Paramount® |
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5,427,669 |
Thin Film DC Plasma Processing System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle Plus |
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5,523,955 |
System for Characterizing AC Properties of a Processing Plasma |
Z’Scan, Navigator® (selected versions) |
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5,535,906 |
Multi-Phase DC Plasma Processing System |
Pinnacle® |
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5,576,939 |
Enhanced Thin Film DC Plasma Power Supply |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus |
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5,654,679 |
Apparatus for Matching a Variable Load Impedance with an RF Power Generator Impedance |
FTMS |
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5,718,813 |
Enhanced Reactive DC Sputtering System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle Plus |
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5,747,935 |
Method and Apparatus for Stabilizing Switch-Mode Powered RF Plasma Processing |
RFG, Apex® |
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5,897,753 |
Continuous Deposition of Insulating Material Using Multiple Anodes Alternated between Positive and Negative Voltages |
RAS |
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6,024,844 |
Enhanced Reactive DC Sputtering |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus |
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6,046,546 |
Stabilizer for Switch-Mode Powered RF Plasma |
RFG, Apex®, Paramount® |
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6,046,594 |
Method and Apparatus for Monitoring Parameters of an RF Powered Load in the Presence of Harmonics |
Lynx, Z-Scan |
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6,156,667 |
Methods and Apparatus for Plasma Processing |
Litmas® |
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6,183,605 |
AC Powered System for Continuous Deposition of a Cathode Material |
RAS |
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6,217,717 |
Periodically Clearing Thin Film Plasma Processing System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle ®Plus |
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6,229,392 |
High Power Switch-Mode Radio Frequency Amplifier Method and Apparatus |
RFG, Apex, Litmas® |
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6,291,938 |
Methods and Apparatus for Igniting and Sustaining Inductively Coupled Plasma |
Litmas® |
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6,326,584 |
Methods and Apparatus for RF Power Delivery |
Litmas® |
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6,368,477 |
Adjustable Energy Quantum Thin Film Plasma Processing System |
Pinnacle®, Summit®, Ascent® |
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6,384,540 |
System for High Power RF Plasma Processing |
Apex® |
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6,392,210 |
Methods and Apparatus for RF Power Process Operations with Automatic Input Power Control |
Litmas® |
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6,424,232 |
Method and Apparatus for Matching a Variable Load Impedance with an RF Power Generator Impedance |
FTMS, Paramount® |
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6,521,099 |
Periodically Clearing Thin Film Plasma Processing System |
Sparc, Sparc-LE, Sparc-LE V, Starburst, Pulsar, Pinnacle® Plus |
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6,617,679 |
Semiconductor Package for Multiple High Power Transistors |
Stealth FET, Apex®, Paramount® |
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6,661,324 |
Voltage and Current Sensor |
Navigator®, (selected versions), Z-Scan |
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6,697,265 |
Wide Range DC Power Supply Utilizing Voltage Doubling Output Capacitors and Inductive Choke to Extend Full Power Load Impedance Range |
Pinnacle® (selected versions), Diamond, X-Arc |
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6,724,148 |
Mechanism for Minimizing Ion Bombardment Energy in a Plasma Chamber |
Xstream |
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6,791,274 |
An Improved RF Power Control Device for RF Plasma Applications |
Ovation |
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6,802,366 |
Swage Method for Cooling Pipes |
Xstream, Litmas, Rapid-OE |
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6,812,648 |
Method of Cleaning Ion Source, and Corresponding Apparatus/System |
Linear Ion Sources |
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6,819,096 |
Power Measurement Mechanism for a Transformer Coupled Plasma Source |
Xstream |
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6,822,396 |
Transformer Ignition Circuit for a Transformer Coupled Plasma Source |
Xstream |
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6,844,802 |
Parallel Core Electromagnetic Device |
Diamond |
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6,888,313 |
Impedance Matching Network with Termination of Secondary RF Frequencies |
Navigator®(selected versions) |
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6,927,358 |
Vacuum Seal Protection in a Dielectric Break |
Xstream |
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6,943,317 |
Apparatus and Method for Fast Arc Extinction with Early Shunting of Arc Current in Plasma |
Summit® |
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6,946,063 |
Deterioration Resistant Chambers for Inductively Coupled Plasma Production |
Xstream |
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6,979,980 |
Soft Switching Interleaved Power Converter |
Summit®, Solaron® |
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7,005,845 |
Power Measurement Mechanism for a Transformer Coupled Plasma Source |
Xstream |
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7,049,751 |
Termination of Secondary Frequencies in RF Power Delivery |
Navigator® (selected versions) |
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7,081,598 |
DC-DC Converter with over-voltage protection circuit |
Summit® |
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7,105,075 |
DC Power Supply Utilizing Real Time Estimation of Dynamic Impedance |
Summit® |
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7,157,857 |
Stabilizing Plasma and Generator Interactions |
Apex®, Paramount® |
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7.245,084 |
Transformer Ignition Circuit for a Transformer Coupled Plasma Source |
Xstream |
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7,289,341 |
Power Supply Adaptive Feed Forward Control Circuit |
Pinnacle (selected versions) |
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7,305,311 |
Arc Detection and Handling in Radio Frequency Power Applications |
Apex®, Paramount® |
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7,423,894 |
Interleaved Soft Switching Bridge Power Converter |
Solaron® Ascent® and Summit® |
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7,445,695 |
Method and System for Conditioning a Vapor Deposition Target |
Ascent® and Summit® |
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7,468,494 |
Reaction Enhancing Gas Feed for Injecting Gas into a Plasma Chamber |
Xstream |
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7,498,908 |
High Power PIN Diode Switch |
Navigator® (selected versions) |
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7,547,005 |
System and Method for Delivering Vapor |
Water Delivery System |
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7,619,200 |
Device, System and Method for Coupling Multiple Photovoltaic Arrays |
Solaron® |
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7,619,910 |
Interleaved Soft Switching Bridge Power Converter |
Solaron® |
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7,624,791 |
Cooling Apparatus for Electronics |
Ovation (selected versions) |
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7,761,247 |
Arc Detection and Handling in Radio Frequency Power Applications |
Apex®, Paramount® |
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7,768,751 |
System and Method for Ground Fault Detection and Interruption |
Solaron® |
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7,822,565 |
System, Method and Apparatus for Monitoring Characteristics of RF Power |
Paramount®, PDX II, Lynx, Navigator® (selected versions) |
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7,825,719 |
System and Method for Wideband Phase-Adjustable Common Excitation |
Paramount® |
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7,839,223 |
Method and Apparatus for Advanced Frequency Tuning |
Paramount® (selected versions) |
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8,044,594 |
Power Supply Ignition System and Method |
Crystal® |
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8,093,884 |
Directional Coupler |
Paramount® VHF |
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8,111,531 |
Interleaved Soft Switching Bridge Power Converter |
Ascent® Summit® and Solaron® |
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8,133,359 |
Methods and Apparatus for Sputtering Deposition Using Direct Current |
Ascent® Plus |
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8,134,812 |
Energy Conversion System with Fault Detection and Interruption |
Solaron® |
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8,203,069 |
System, Method and Apparatus for Coupling Photovoltaic Arrays |
Solaron® |
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