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Advanced Energy Industries, Inc.
Dual-Cathode Reactive Sputtering Power Supply with Bi-Polar Pulsing Described in New Brochure
FORT COLLINS, Colorado (May 31, 1996)
—Advanced Energy Industries, Inc. (AE) introduces the most flexible plasma-process development tool available for dual-cathode sputtering—the MDX Astral 20 kW bi-polar pulse power supply. By offering independent control of the power delivered to each cathode, this sophisticated power supply delivers maximum performance for dual-cathode reactive-mode sputtering of single compounds and alloys. It also offers adjustable frequency and duty cycle as well as low-arc energy.