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Advanced Energy Industries, Inc.
Advanced Energy Announces the VZX 2500 and 5000 W, 4 MHz Impedance Matching Networks
FORT COLLINS, Colorado (November 4, 1997)
—AE’s new VZX network series gives you the latest in impedance-matching technology. Like all matching networks, each specific configuration of the VZX series: optimizes tuning over a specific impedance range; handles different combinations of voltage and current as well as high frequencies, such as 13.56 MHz and 27.12 MHz; and addresses specific plasma process tool applications.
- RS-232 improves system flexibility and eliminates the need for a dedicated control module (VZX 5000 feature, VZX 2501 option)
- Fiber-optic limit detection improves overall system reliability (VZX 5000 only)
- Optional V-I probe permits end-point detection for customized control of your chamber and process
- Easy to integrate with AE as well as non-AE power supplies
- Air cooled