For more information, contact:

Tom Grove
Advanced Energy Industries, Inc.
(970) 224-6313

Advanced Energy Introduces CE-Compliant Low-Power RF Power Supplies with Input Power Factor Correction: The RFX 600A Series with 600 W Output

FORT COLLINS, Colorado (November 4, 1997)—Advanced Energy Industries, Inc. (AE) announces the 13.56 MHz RFX 600A series of power supplies delivering low-wattage industrial power with input power factor correction for such applications as RF sputtering, plasma etching/deposition, and RF biasing, where repeatability and accurate power control are required. Delivering up to 600 W of reliable power, the cost-effective RFX 600A series has proven useful in such diverse environments as laboratory development and flat panel coating production. All RFX 600A models meet CE standards for safety, immunity, and emissions.


The RFX 600A series incorporates innovative power amplifier design and instrumentation that provide superior repeatability and accuracy over other RF equipment. Its advanced design features a patented class of RF operations, proven in AE’s higher-power RFG product line. Thus, the RFX 600A series offers you the most cost-effective low-power RF solutions available with no comprise to AE’s high standards of quality, reliability, repeatability, and accuracy. The RFX 600A series provides power factor correction to lower the ac line current and minimize line current distortion. In addition, the RFX 600A series offers remarkably accurate linear power measurement to satisfy the demanding requirements of your process.

For a free copy of literature describing the RFX 600A series, contact AE at the address, phone number, or website given above.

Founded in 1981, AE is a leading supplier of power conversion and control systems for plasma-based thin film production equipment. Our systems are critical to industrial processes that use gaseous plasmas to deposit or etch thin film layers on materials or substrates such as glass, silicon, and metals during the manufacture of semiconductors, data storage media, flat panel displays, and a host of other products.