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Advanced Energy Industries, Inc.
Advanced Energy Announces the HFG Series of 2500 and 5000 W, 4 MHz CE-Certified Power Supplies
FORT COLLINS, Colorado (November 7, 1997)
—Advanced Energy Industries, Inc.’s new HFG 2501 and HFG 5000 4 MHz power supplies use AE's patented, field-proven RF circuit topology to deliver up to 2500 W and 5000 W, respectively, into 50-W, non-reactive loads. Plasma process tool applications for the HFG series include plasma etch and deposition, reactive ion etch, RF sputtering, RF bias, and other related plasma processes. The reliable HFGs regulate on forward power and delivered power; are certified by CE, UL/CSA, and GS; and are SEMI S2-compliant.
- Compliant with CE, UL/CSA, GS, and SEMI S2
- Power densities of ±5 W per cubic inch with superior repeatability, stability, and linearity
- Bulkhead-mounted ac connector for easy installation and maximum wiring flexibility
- Front indicators: AC On, RF On, Overtemperature, Power Limit, and Interlock Open