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Advanced Energy Industries, Inc.
AE Introduces the Next Generation Low-Frequency Power Supply for 40 kHz Reactive Sputtering
FORT COLLINS, Colorado (March 25, 1998)
—Advanced Energy Industries, Inc. (AE) announces the next generation low-frequency power supply with enhanced arc control and internal load matching for 40 kHz reactive sputtering applications—the advanced PEII. The PEII series offers outputs of up to 60 kW—with no external combining hardware such as transformers.
High power density
- Wide tap range
- Regulation on power, voltage, or current
- Enhanced arc control
- Flexible modularity
- Automatic process safeguard