For more information, contact:

Richard Beck
Advanced Energy Industries, Inc.
Cathy Kawakami
Advanced Energy Industries, Inc.

Advanced Energy Highlights New Products at SEMICON West 2001

FORT COLLINS, Colo., July 3, 2001- Advanced Energy (Nasdaq: AEIS), an industry-leading provider of technology solutions for the manufacture of semiconductors, data storage products, and flat panel displays, will highlight its new product offerings for semiconductor manufacturing applications at the upcoming SEMICON West industry tradeshow during the week of July 16, 2001.

Centered on the company’s “convergence” theme, the new product offerings include technology solutions in the power management, temperature sensing and control, gas delivery management and hardware and software connectivity for overall equipment effectiveness. The company is in the early stages of executing its vision to move beyond technology integration by converging critical capabilities to deliver an integrated array of subsystems to its OEM and end user customer base.

The company will feature the following new products at the SEMICON West 2001 tradeshow:

4000 Deposition Rate Tuner
Wafer temperature sensor that optimizes dielectric PECVD tool processes with feedback in less than one minute.

EPM™ Equipment Productivity Manager
Suite of network connectivity that includes web-based automated data collection and real-time database for time-series parametric data. Advanced Energy is the exclusive distributor of this product that was developed by Symphony Systems.

Mach One™ Mass Flow Controller
New, patented mass flow controller for gas delivery management that combines sonic nozzle technology with an advanced digital control valve.

Point-of-Use Thermoelectric Temperature Control Systems
Temperature control designed for plasma processing applications. Point-of-use systems are smaller, more efficient and more cost effective than traditional temperature control technologies.

Atlas™ VHF
Series of generators specifically designed for multifaceted CVD and plasma etch applications at very high frequencies.

Pinnacle™ 3000 DC Power Supply for Lower-Power Applications
Power delivery in a compact half-rack design with high accuracy, very wide tap range, low-stored (not diverted) arc energy-plus the flexibility to operate as either a process power supply or bias supply.

Pinnacle™ Diamond Series Water-Cooled Power Supply
Enables high power density and increased reliability in PVD applications while maintaining all of the advanced features of the Pinnacle™ platform.

We invite you to visit Advanced Energy’s booth at SEMICON West 2001 in San Francisco, Calif., July 16-18, 2001. Copies of product brochures are available on AE's website at or by sending a request via e-mail to

About Advanced Energy
Advanced Energy is a global leader in the development, marketing, and support of technology solutions that are central in the manufacture of semiconductors, data storage products, and flat panel displays. Original equipment manufacturers (OEMs) and end-users around the world depend on AE products when plasma-based technology plays a vital role in their manufacturing process. AE offers a comprehensive suite of products for vacuum process systems, including power management, temperature sensing, dynamic temperature control, gas delivery management, process monitoring and machine control tools, ion-beam sources, and plasma abatement technologies. AE technology solutions are sold and supported globally by direct offices, representatives, and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq under the symbol AEIS. AE’s URL is