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AE to Showcase Field-Proven Xstream™ Remote Plasma Source at SEMICON Europa 2004
Visit AE at SEMICON Europa Hall B1 Booth #600
AE to introduce Aera® Transformer™ multi-gas, multi-range digital MFC and Litmas™ remote plasma abatement source
FORT COLLINS, Colo., April 14, 2004—Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced that it will showcase its high-performance Xstream™ remote plasma source with Active Matching Network™ during SEMICON Europa 2004. AE also will feature its new Litmas™ remote plasma source for semiconductor perfluorinated compound (PFC) abatement; its new Aera® Transformer™ multi-gas, multi-range (MGMR) digital mass flow controller (MFC) series; and the field-proven Pinnacle® Plus+ at the exposition, being held April 20-22 at the New Munich Trade Fair Centre in Germany. The newest offerings from AE are designed to give OEMs and end users the solutions to help optimize their semiconductor manufacturing processes.