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Advanced Energy Unveils New Multi-Gas, Multi-Range Digital MFCs That Reduce Spares Inventories, Tool Downtime and CoO
Aera® Transformer™ MFCs offer new levels of process flexibility for all plasma process environments in today’s advanced fabs
FORT COLLINS, Colo., Apr. 8, 2004—Advanced Energy Industries, Inc. (Nasdaq: AEIS) today announced its new Aera® Transformer™ family of digital multi-gas, multi-range mass flow controllers (MGMR MFCs). These advanced, high-precision products provide original equipment manufacturers (OEMs) and end users with optimal MFC flexibility and process efficiency for their semiconductor and industrial vacuum applications.