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AE to Feature Aera® PI-980™ Series Pressure-Insensitive MFC for Advanced Processes at SEMICON Japan 2005
HACHIOJI, Japan., November 30, 2005
—Advanced Energy K.K. today announced that it will feature its Aera®
PI-980™ series pressure-insensitive mass flow controller (MFC) during SEMICON Japan 2005. The company also will showcase its Navigator™ digital matching network, Ovation™ very-high frequency (VHF) power delivery system, Litmas™ RPS 1501 and 3001 remote plasma source platform and the Aera®
EPV exhaust pressure controller at the exposition, held December 7-9 at the Makuhari Messe (Nippon Convention Center) in Chiba, Japan.
Leveraging a diverse product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity and lower cost of ownership for its customers. This portfolio includes a comprehensive line of technology solutions in power, flow management, thermal instrumentation and plasma and ion beam sources for original equipment manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia and Europe and offers global sales and support through direct offices, representatives and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. More information can be found at www.advanced-energy.com.
Advanced Energy, AE, Aera, PI-980, NeuralStep, Navigator, Z’Scan, Ovation and Litmas are trademarks of Advanced Energy Industries, Inc.