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AE to Feature Award-Winning Aera® EPV Exhaust Pressure Controller for Advanced Processes at SEMICON® Japan 2006
AE also showcasing Litmas™ Remote Plasma Source Platform and Navigator® Digital Matching Network
HACHIOJI, Japan, November 28, 2006—Advanced Energy K.K. today announced that it will feature its Aera® EPV-100AW exhaust pressure controller during SEMICON® Japan 2006. The company also will showcase its Litmas™ RPS 1501 and 3001 remote plasma source platform, Navigator® digital matching network as well as other products at the show held December 6-8 at the Makuhari Messe (Nippon Convention Center) in Chiba, Japan.
The Aera EPV-100AW exhaust pressure controller is a patented technology that enables user selection of either “absolute” or differential control of a process chamber’s exhaust pressure. The EPV enables precise control of exhaust pressure and, thereby, of oxide film thickness—regardless of atmospheric pressure changes, such as weather conditions, house exhaust-pressure fluctuations or altitude. The EPV’s superior durability, reliability and reduced power consumption enable improved yield and lower cost of ownership.
Also showcased will be AE’s Litmas RPS 1.5 kW and 3 kW integrated plasma source and power-delivery systems. The Litmas RPS is well-suited to deliver reactive gas specie fluxes for process applications such as wafer pre-clean, photoresist strip and thin-film deposition. Its small footprint, high performance, ease of use and low cost of ownership allow process engineers to focus on developing critical plasma-based processes with lower device damage, higher throughput and higher yields.
In addition, in AE’s booth #4B-501 will be the Navigator, which is equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms for high-power solar and FPD applications. The Navigator matching network minimizes reflected power by automatically tuning the complex impedance of a coupled plasma. An optional, internal Z’Scan® RF sensor allows real-time measurement and analysis of process power and impendence, providing the ability to identify and significantly reduce process variability. The Navigator digital matching network provides advanced match technology for rapid, accurate and reliable matching across a wide range of load impedances.
Also exhibited will be the company’s new line of Sekidenko optical fiber thermometers (OFTs) and emissometers comprised of the OR4000T, OR4000E, and the OR400T family of products. AE’s OFTs and emissometers provide industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MO-CVD, UV cure and a variety of other semiconductor processes.
To learn more about AE’s products during SEMICON Japan, December 6-8, visit their booth #4B-501in hall 4 at the Makuhari Messe (Nippon Convention Center) in Chiba, Japan. Editors interested in meeting with AE during the show may contact Angie Kellen by phone at: (650) 968-8900 x120, or email: firstname.lastname@example.org.
About Advanced Energy®
Advanced Energy® develops innovative power and control technologies that drive high-growth, plasma thin-film manufacturing processes worldwide, including semiconductors, flat panel displays, data storage products, solar cells, architectural glass, and other advanced product applications.
AE®’s product portfolio includes precise, flexible power systems; reliable gas and liquid flow-management systems; accurate thermal instruments; and global support services. Leveraging this focused product portfolio and technology leadership, AE creates solutions that maximize process impact, improve productivity, and lower cost of ownership for its customers, including original equipment manufacturers (OEMs) and end-users around the world.
AE operates in regional centers in North America, Asia, and Europe and offers global sales and support through direct offices, representatives, and distributors. Founded in 1981, AE is a publicly held company traded on Nasdaq National Market under the symbol AEIS. For more information, go to www.advanced-energy.com.
Advanced Energy®, AE®, Aera®, Z'Scan®, Navigator®, and Litmas™ are trademarks of Advanced Energy Industries, Inc.