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Director of Corporate Communications
Advanced Energy Industries, Inc.
Navigator® II FastCap™ Solid-State Technology Provides Fastest Matching for Sub-22 nm Semiconductor Processes
San Francisco, Calif., July 10, 2012—Advanced Energy Industries, Inc. (Nasdaq:AEIS), a leader in power conversion solutions, today announced the introduction of the Navigator® II FastCap™ matching network. The latest extension of the Navigator platform, the FastCap matching network breaks new ground by providing the fastest matching available for next-generation thin-film plasma processes. The new product will be featured this week at the Advanced Energy product showcase during the SEMICON® West tradeshow in San Francisco.
Yuval Wasserman, president of Advanced Energy Thin Films, said, "Over the last decade, our digital matching technology and industry-exclusive tune-while-pulsing capabilities set new standards in RF power conversion with over 15,000 units installed worldwide. Now, with the launch of the Navigator II FastCap, our innovation in solid-state matching technology provides the fastest tuning times in the industry, addressing the increasing demand on process predictability and reproducibility in sub-22 nm technology nodes."
The Navigator II FastCap addresses the need for high-speed matching using a patented hot-switchable capacitor arrays in place of conventional vacuum capacitors, producing significant tune-time advantage, and reducing tuning times to as little as 2 msec. The FastCap solution is qualified for use with AE's Paramount® line of RF power supplies. Currently under evaluation at several major OEMs, this product is available for further evaluation on most common low-power PECVD and etch bias applications. General product availability with expanded power and frequency ranges are planned for release in 2013.
About SEMICON West
SEMICON West is the flagship annual event for the global microelectronics industry. It is the premier event for the display of new products and technologies for microelectronics design and manufacturing, featuring technologies from across the supply chain, from electronic design automation, to device fabrication (wafer processing), to final manufacturing (assembly, packaging, and test). The show takes place at the Moscone Convention Center, 747 Howard Street, San Francisco, CA from July 10-12, 2012. AE will host customer meetings in booth # 347. Visitors are welcome to take a self-guided tour of AE products at kiosk displays in the booth.
About Advanced Energy
Advanced Energy (Nasdaq: AEIS) is a global leader in innovative power and control technologies for high-growth, thin-film manufacturing and solar-power generation. Advanced Energy is headquartered in Fort Collins, Colorado, with dedicated support and service locations around the world. For more information, go to www.advanced-energy.com.